FF-63/80E

FF-63/80E

$5,600.00Price
  • Details:

    All Turbo Molecular Pumps can be mounted in any direction

     

    Available in 110V or 220V

     

    Noise: <55 dB

    Ambient Temperature: 5-32⁰C, 41-90⁰F

    Cooling Water Temperature: 10-25⁰C, 50-75⁰F

    Recommended Running Pressure <0.38 Torr (<50 Pa)

    Bearings: Ceramic, Greased

     

    ***100% dry, Magnetic bearing models available***

     

    Model # FF-63/80E
    Pumping Speed m^3/hr (l/s) [cfm] 223 (62) [131]
    Ultimate Total Pressure w/ISO flange   Torr (Pa) 2.6x10-8 (3.5x10-6)
    Ultimate Total Pressure  w/CF flange   Torr (Pa) 3.8x10-9 (5x10-7)
    Intake Flange Options ISOK63, CF450
    Exhaust Flange Options KF16
    Rotation Speed (rpm) 72000
    Run-up time (min) <2
    Backing pump Requirements m^3/hr  (l/s) [cfm] 2.9-7.2 (0.8-2) [1.7-4.2]
    Bake-Out Temperature (ISOK) ≤100⁰C, ≤212⁰F
    Bake-Out Temperature (CF) ≤120⁰C, ≤248⁰F
    Cooling Method Air/Water
    Compression Ratio N2: 10^9, H2 2x10^5
    Max. Vibration (μm) <0.05
    Weight     kg (lbs) ISOK: 2.6  (5.7) [CF: 3.5 (7.7)]
    Dimension (mm) 174x142x116
    Dimensions (in) 6.9x5.6x4.6